Answer Posted / er. ankush miglani 9718151073
What is MEMS Technology?
Micro-Electro-Mechanical Systems (MEMS) is the integration
of mechanical elements, sensors, actuators, and electronics
on a common silicon substrate through microfabrication
technology. While the electronics are fabricated using
integrated circuit (IC) process sequences (e.g., CMOS,
Bipolar, or BICMOS processes), the micromechanical
components are fabricated using compatible "micromachining"
processes that selectively etch away parts of the silicon
wafer or add new structural layers to form the mechanical
and electromechanical devices
MEMS promises to revolutionize nearly every product
category by bringing together silicon-based
microelectronics with micromachining technology, making
possible the realization of complete systems-on-a-chip.
MEMS is an enabling technology allowing the development of
smart products, augmenting the computational ability of
microelectronics with the perception and control
capabilities of microsensors and microactuators and
expanding the space of possible designs and applications.
Microelectronic integrated circuits can be thought of as
the "brains" of a system and MEMS augments this decision-
making capability with "eyes" and "arms", to allow
microsystems to sense and control the environment. Sensors
gather information from the environment through measuring
mechanical, thermal, biological, chemical, optical, and
magnetic phenomena. The electronics then process the
information derived from the sensors and through some
decision making capability direct the actuators to respond
by moving, positioning, regulating, pumping, and filtering,
thereby controlling the environment for some desired
outcome or purpose. Because MEMS devices are manufactured
using batch fabrication techniques similar to those used
for integrated circuits, unprecedented levels of
functionality, reliability, and sophistication can be
placed on a small silicon chip at a relatively low cost.
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