Microelectromechanical systems (MEMS):

The MEMS Sensor Suite on a Chip provides the capability,
monolithically integrated onto one MEMS chip, to sense
temperature, humidity, and two axes of acceleration. The
device incorporates a MEMS accelerometer, a MEMS humidity
sensor, and a MEMS temperature sensor on one chip. These
individual devices incorporate proof masses, suspensions,
humidity sensitive capacitors, and temperature sensitive
resistors (thermistors) all fabricated in a common
fabrication process that allows them to be integrated onto
one micromachined chip. The device can be fabricated in a
simple micromachining process that allows its size to be
miniaturized for embedded and portable applications. During
operation, the sensor suite chip monitors temperature
levels, humidity levels, and acceleration levels in two
axes. External circuitry allows sensor readout, range
selection, and signal processing.